2:54Multi-Patterning Techniques: Enabling Dimensions Beyond Lithography Resolution LimitsLam Research61.0K viewsView & Download
13:55Double Patterning to the rescue (LELE, LFLE, SADP) - Part 1nanolearning116.6K viewsView & Download
1:46When Lithography Requires Multiple Patterning: Avoiding Analog Distortions in the Resist LayerFrederick Chen306 viewsView & Download